VHS-400 Diffusion Pump

Name: 冰研應用股份有限公司
Address: 大埔頂45之2號, 竹南鎮, 苗栗縣, 350029
Telephone: 037-620170

商品名稱:

規格介紹:

Backstreaming Rate	1 x 10^-3 mg/cm²/min
Cooldown Time	25 min
Electrical Requirements	3 ph 50/60 Hz 208/240/380/480 V
Fluid Charge	1000 CC
Fluid Type	Oil
Input Voltage	208, 240, 380, 480 V
Maximum Forepressure - Full Load	0.55 Torr 0.72 mbar
Maximum Forepressure - No Load	0.65 Torr 0.85 mbar
Maximum Throughput	6.3 T-L/s (8.4 mbar-L/s)
Operating Range	1.4 x 10^-3 to <5 x 10^-9 Torr 1.9 x 10^-3 to <6.5 x 10^-9 mbar
Pump Power	4400 W
Pump Weight	180 lbs 81 kg
Pumping Speed - Air	4500 L/s
Pumping Speed - Air, via AVS 4.1 (1963)	8000 L/s
Pumping Speed - He/H2	5625 L/s
Recommended Backing Pump	≥30 cfm (51 m³/hr)
Warmup Time	15 min
Water Connections	1/8 inch FPT
Water Cooling - Temperature Requirement	60-80 °F 15-26 °C
Water Cooling Flow Requirement	0.5 gpm 115 L/hr